Inventor · Ulm, DE

Markus Zenzinger

3Patents
2h-index
9Co-inventors
33Inventor score

Filing activity: Sep 27, 2004 → Nov 15, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US7408616B2 Microlithographic exposure method as well as a projection exposure system for carrying out the method Physics 76 Expired
US7847921B2 Microlithographic exposure method as well as a projection exposure system for carrying out the method Physics 47 Active
US8767181B2 Microlithographic exposure method as well as a projection exposure system for carrying out the method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.