Markus Zenzinger
3Patents
2h-index
9Co-inventors
33Inventor score
Filing activity: Sep 27, 2004 → Nov 15, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7408616B2 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Physics | 76 | Expired |
| US7847921B2 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Physics | 47 | Active |
| US8767181B2 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.