Martin E. Freeborn
4Patents
3h-index
4Co-inventors
43Inventor score
Filing activity: Aug 31, 2009 → Jun 26, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9773643B1 | Apparatus and method for deposition and etch in gap fill | Electricity | 28 | Active |
| US10373806B2 | Apparatus and method for deposition and etch in gap fill | Electricity | 15 | Active |
| US10957514B2 | Apparatus and method for deposition and etch in gap fill | Electricity | 3 | Active |
| US9111733B2 | Plasma ignition performance for low pressure physical vapor deposition (PVD) processes | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.