Matthew Flaugh
3Patents
0h-index
10Co-inventors
28Inventor score
Filing activity: Feb 27, 2020 → Oct 12, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11189499B2 | Atomic layer etch (ALE) of tungsten or other metal layers | Electricity | 0 | Active |
| US12272558B2 | Selective and isotropic etch of silicon over silicon-germanium alloys and dielectrics; via new chemistry and surface modification | Electricity | 0 | Active |
| US11715643B2 | Gas phase etch with controllable etch selectivity of metals | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.