Max Biberger
1Patents
1h-index
6Co-inventors
25Inventor score
Filing activity: Mar 14, 2000 → Mar 14, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6342133B2 | PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter | Electricity | 51 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.