Michael E. Exterkamp
2Patents
2h-index
4Co-inventors
30Inventor score
Filing activity: May 23, 2000 → Dec 17, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6794279B1 | Passivating inorganic bottom anti-reflective coating (BARC) using rapid thermal anneal (RTA) with oxidizing gas | Emerging Cross-Sectional Technologies | 19 | Expired |
| US7220655B1 | Method of forming an alignment mark on a wafer, and a wafer comprising same | Electricity | 10 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.