Michael Gruenhagen
3Patents
1h-index
5Co-inventors
33Inventor score
Filing activity: Dec 10, 2014 → Jul 21, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9564378B2 | Detection of lost wafer from spinning chuck | Electricity | 7 | Active |
| US11476129B2 | Translating and rotating chuck for processing microelectronic substrates in a process chamber | Electricity | 1 | Active |
| US12334348B2 | Substrate scanning apparatus with pendulum and rotatable substrate holder | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.