Inventor · Wetzlar, DE

Michael Halama

1Patents
1h-index
2Co-inventors
22Inventor score

Filing activity: May 12, 2004 → May 12, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US7424393B2 Wafer inspection device Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.