Michael Lill
4Patents
3h-index
18Co-inventors
47Inventor score
Filing activity: Apr 20, 1999 → Jun 29, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7460206B2 | Projection objective for immersion lithography | Physics | 53 | Expired |
| US6227709A | Bearing shell with retaining cam and method for production thereof | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| US8279402B2 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Physics | 5 | Active |
| US10330237B2 | Pipe lining material for use for at least two predefined pipeline nominal widths | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.