Inventor · San Jose, CA, US

Michael T. Starr

8Patents
6h-index
19Co-inventors
60Inventor score

Filing activity: Feb 23, 1976 → Sep 19, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US8075690B2 Diffuser gravity support Chemistry; Metallurgy 20 Active
US7429410B2 Diffuser gravity support Chemistry; Metallurgy 17 Active
US6257045A Automated substrate processing systems and methods Emerging Cross-Sectional Technologies 17 Expired
US6205870A Automated substrate processing systems and methods Emerging Cross-Sectional Technologies 12 Expired
US4047653A Film retriever Physics 10 Expired
US5865089A Linear thruster Mechanical Engineering; Lighting; Heating 8 Expired
US5957029A Linear thruster Mechanical Engineering; Lighting; Heating 6 Expired
US7461794B2 Substrate temperature regulating support pins Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.