Michael Widmann
3Patents
2h-index
18Co-inventors
37Inventor score
Filing activity: Mar 12, 2009 → Mar 6, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8279402B2 | Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same | Physics | 5 | Active |
| US8705006B2 | Method and device for connecting an optical element to a frame | Emerging Cross-Sectional Technologies | 4 | Active |
| US9604299B2 | Method and device for connecting an optical element to a frame | Emerging Cross-Sectional Technologies | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.