Inventor · Helsinki, FI

Mikko Soderlund

6Patents
0h-index
10Co-inventors
42Inventor score

Filing activity: Dec 20, 2000 → Sep 24, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7111030B2 Method of detecting pilot tones in a noisy signal Electricity 0 Expired
US10590536B2 Apparatus, method and reaction chamber Electricity 0 Active
US10385450B2 Method of coating a substrate and an apparatus Chemistry; Metallurgy 0 Active
US12421596B2 Method and apparatus for processing surface of a semiconductor substrate Electricity 0 Active
US10167551B2 Apparatus, method and reaction chamber Electricity 0 Active
US10472150B2 Package wrapping including PLA film with moisture barrier by atomic layer deposition Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.