Ming-Sen Tung
1Patents
1h-index
11Co-inventors
29Inventor score
Filing activity: Aug 28, 2014 → Aug 28, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10146141B2 | Lithography process and system with enhanced overlay quality | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.