Moshe Baruch
3Patents
3h-index
21Co-inventors
46Inventor score
Filing activity: Feb 23, 2004 → Aug 15, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7242477B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 83 | Expired |
| US8582114B2 | Overlay metrology by pupil phase analysis | Physics | 5 | Active |
| US9164397B2 | Optics symmetrization for metrology | Physics | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.