Optics symmetrization for metrology
US9164397B2 · kind B2 · utility
4Cited by
22References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 22, 2011 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | Apr 29, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70616
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention includes an illumination source, at least one illumination symmetrization module (ISM) configured to symmetrize at least a portion of light emanating from the illumination source, a first beam splitter configured to direct a first portion of light processed by the ISM along an object path to a surface of one or more specimens and a second portion of light processed by the ISM along a reference path, and a detector disposed along a primary optical axis, wherein the detector is configured to collect a portion of light reflected from the surface of the one or more specimens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.