Naftall E. Lustig
3Patents
3h-index
15Co-inventors
43Inventor score
Filing activity: Feb 28, 2000 → Mar 23, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6251787A | Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing | Electricity | 19 | Expired |
| US6887783B2 | Bilayer HDP CVD/PE CVD cap in advance BEOL interconnect structures and method thereof | Electricity | 13 | Expired |
| US6914320B2 | Bilayer HDP CVD/PE CVD cap in advanced BEOL interconnect structures and method thereof | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.