Nam Le
5Patents
5h-index
17Co-inventors
52Inventor score
Filing activity: May 3, 1996 → Apr 2, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6413321B1 | Method and apparatus for reducing particle contamination on wafer backside during CVD process | Chemistry; Metallurgy | 589 | Expired |
| US5910375A | Tintable, scratch resistant coatings for plastic ophthalmic lenses | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5916669A | Enhanced abrasion resistance radiation curable coating for substrates | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6436303B1 | Film removal employing a remote plasma source | Electricity | 14 | Expired |
| US6843881B2 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Physics | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.