Inventor · Kawasaki, JP

Nobutoshi Abe

3Patents
3h-index
4Co-inventors
39Inventor score

Filing activity: Nov 2, 1982 → Feb 4, 1987

Most-cited inventions

PatentTitleAreaCited byStatus
US4715392A Automatic photomask or reticle washing and cleaning system Emerging Cross-Sectional Technologies 46 Expired
US4422547A Container for holding substrate Electricity 29 Expired
US4568835A Apparatus for detecting foreign matters on a planar substrate Physics 20 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.