Container for holding substrate
US4422547A · kind A · utility
29Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 1982 |
| Grant date | Dec 27, 1983 |
| Priority date | — |
| Expiry date | Nov 29, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67386
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A container for a piece of substrate such as reticle, mask or wafer is disclosed. The container comprises a housing body having an opening for receiving a substrate, a door for closing and opening said opening of the housing body and means for fixing the received substrate to the container. Said fixing means includes a contact member movable to fix the substrate in the position and a member for moving the contact member in link with the motion of the door.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.