Inventor · Burghausen, DE

Norbert Sickmann

1Patents
1h-index
7Co-inventors
25Inventor score

Filing activity: Dec 9, 1997 → Dec 9, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US5980361A Method and device for polishing semiconductor wafers Performing Operations; Transporting 33 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.