Paul Holzapfel
15Patents
10h-index
20Co-inventors
64Inventor score
Filing activity: Jul 15, 1996 → Oct 6, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5872633A | Methods and apparatus for detecting removal of thin film layers during planarization | Electricity | 212 | Expired |
| US6371838B1 | Polishing pad conditioning device with cutting elements | Emerging Cross-Sectional Technologies | 72 | Expired |
| US5961369A | Methods for the in-process detection of workpieces with a monochromatic light source | Physics | 55 | Expired |
| US5733171A | Apparatus for the in-process detection of workpieces in a CMP environment | Physics | 46 | Expired |
| US5958148A | Method for cleaning workpiece surfaces and monitoring probes during workpiece processing | Electricity | 28 | Expired |
| US5842912A | Apparatus for conditioning polishing pads utilizing brazed diamond technology | Performing Operations; Transporting | 25 | Expired |
| US5823853A | Apparatus for the in-process detection of workpieces with a monochromatic light source | Physics | 23 | Expired |
| US5993289A | Methods for the in-process detection of workpieces in a CMP environment | Physics | 16 | Expired |
| US6217410A | Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing | Electricity | 11 | Expired |
| US6960115B2 | Multiprobe detection system for chemical-mechanical planarization tool | Electricity | 11 | Expired |
| US6347982B1 | Method for making a polishing apparatus utilizing brazed diamond technology and titanium nitride | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6805613B1 | Multiprobe detection system for chemical-mechanical planarization tool | Electricity | 9 | Expired |
| US6347981B1 | Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6350184B1 | Polishing pad conditioning device with cutting elements | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7422892B2 | Enzyme-based device for environmental monitoring | Chemistry; Metallurgy | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.