Peter David Engblom
8Patents
2h-index
23Co-inventors
43Inventor score
Filing activity: Nov 26, 2012 → Dec 17, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10338484B2 | Recipe selection based on inter-recipe consistency | Physics | 9 | Active |
| US10001711B2 | Inspection method, lithographic apparatus, mask and substrate | Physics | 3 | Active |
| US10394137B2 | Inspection method, lithographic apparatus, mask and substrate | Physics | 1 | Active |
| US9280064B2 | Lithographic method and apparatus | Physics | 0 | Active |
| US10901330B2 | Recipe selection based on inter-recipe consistency | Physics | 0 | Active |
| US12013647B2 | Metrology method | Physics | 0 | Active |
| US11703772B2 | Recipe selection based on inter-recipe consistency | Physics | 0 | Active |
| US11860548B2 | Method for characterizing a manufacturing process of semiconductor devices | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.