Peter Gruenwald
1Patents
1h-index
5Co-inventors
25Inventor score
Filing activity: Oct 24, 1997 → Oct 24, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5965047A | Rapid thermal processing (RTP) system with rotating substrate | Electricity | 29 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.