Rainer Schierle
7Patents
4h-index
11Co-inventors
50Inventor score
Filing activity: Apr 5, 2000 → Jul 22, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7248062B1 | Contactless charge measurement of product wafers and control of corona generation and deposition | Electricity | 20 | Expired |
| US7057741B1 | Reduced coherence symmetric grazing incidence differential interferometer | Physics | 16 | Expired |
| US7173715B2 | Reduced coherence symmetric grazing incidence differential interferometer | Physics | 6 | Expired |
| US7719294B1 | Systems configured to perform a non-contact method for determining a property of a specimen | Electricity | 5 | Active |
| US8786842B2 | Grazing and normal incidence interferometer having common reference surface | Physics | 3 | Active |
| US7538333B1 | Contactless charge measurement of product wafers and control of corona generation and deposition | Electricity | 2 | Active |
| US9273952B2 | Grazing and normal incidence interferometer having common reference surface | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.