Systems configured to perform a non-contact method for determining a property of a specimen

US7719294B1 · kind B1 · utility

Assignee

• KLA-Tencor Technologies Corp. · US

Inventors

• Amin Samsavar · San Jose, US
• John M. Schmidt · Oakland, US
• Rainer Schierle · Los Altos, US
• Gregory S. Horner · Santa Clara, US
• Thomas G. Miller · Houston, US
• Zhiwei Xu · Sunnyvale, US
• Xiaofeng Hu · Shanghai, CN
• Jianou Shi · State College, US
• Sergio Edelstein · Los Gatos, US

Key dates

• Filing date: Jul 27, 2006
• Grant date: May 18, 2010
• Expiry date: Jul 27, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Systems configured to perform a non-contact method for determining a property of a specimen are provided. One system configured to perform a non-contact method for determining a property of a specimen includes a focused biasing device configured to provide a stimulus to a focused spot on the specimen. The system also includes a sensor configured to measure a parameter of a measurement spot on the specimen. The measurement spot overlaps the focused spot. The system further includes a processor configured to determine the property of the specimen from the parameter.