Ralf B. Lukner
3Patents
3h-index
4Co-inventors
36Inventor score
Filing activity: Mar 17, 1999 → May 31, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6179688A | Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation | Performing Operations; Transporting | 14 | Expired |
| US6572441B2 | Method of and apparatus for chemical-mechanical polishing | Performing Operations; Transporting | 6 | Expired |
| US6572443B1 | Method and apparatus for detecting a process endpoint | Performing Operations; Transporting | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.