Robert Amme
2Patents
2h-index
2Co-inventors
27Inventor score
Filing activity: Feb 17, 1995 → May 22, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5637188A | Processing substrates with a photon-enhanced neutral beam | Electricity | 5 | Expired |
| US5897844A | Photon-enhanced neutral beam etcher and cleaner | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.