Inventor · Pliening, DE

Robert Trauner

4Patents
1h-index
7Co-inventors
33Inventor score

Filing activity: Oct 12, 2017 → Oct 21, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10345250B2 Method of inspecting a sample with a charged particle beam device, and charged particle beam device Electricity 1 Active
US11610755B2 Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample Electricity 0 Active
US11687008B2 Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof Electricity 0 Active
US11195691B2 Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.