Roman Klein
4Patents
2h-index
8Co-inventors
37Inventor score
Filing activity: Oct 2, 2002 → Nov 7, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7172788B2 | Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7060993B2 | Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements | Physics | 10 | Expired |
| US7462842B2 | Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements | Physics | 2 | Expired |
| US10627336B2 | Optical measurement device | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.