Ryoji Ikebe
7Patents
1h-index
10Co-inventors
40Inventor score
Filing activity: Nov 24, 2015 → Apr 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10707109B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US10128137B2 | Management method of substrate processing apparatus and substrate processing system | Electricity | 0 | Active |
| US10217628B2 | Substrate processing apparatus and processing method of substrate processing apparatus | Electricity | 0 | Active |
| US11011436B2 | Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system | Electricity | 0 | Active |
| US12300524B2 | Substrate processing system | Electricity | 0 | Active |
| US11018035B2 | Substrate processing system | Electricity | 0 | Active |
| US10713772B2 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.