Ryuichiro Mitani
4Patents
2h-index
8Co-inventors
37Inventor score
Filing activity: Jun 16, 2004 → Dec 3, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8554356B2 | Processing end point detection method, polishing method, and polishing apparatus | Electricity | 20 | Active |
| US7300332B2 | Polished state monitoring apparatus and polishing apparatus using the same | Performing Operations; Transporting | 14 | Expired |
| US10207390B2 | Processing end point detection method, polishing method, and polishing apparatus | Electricity | 1 | Active |
| US10890899B2 | Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.