Sae Takagi
2Patents
2h-index
4Co-inventors
27Inventor score
Filing activity: Feb 15, 1996 → Jan 10, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6009828A | Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method | Emerging Cross-Sectional Technologies | 14 | Expired |
| US5618758A | Method for forming a thin semiconductor film and a plasma CVD apparatus to be used in the method | Emerging Cross-Sectional Technologies | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.