Satoru Anzai
10Patents
8h-index
11Co-inventors
69Inventor score
Filing activity: Mar 10, 1975 → Oct 22, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4666273A | Automatic magnification correcting system in a projection optical apparatus | Physics | 84 | Expired |
| US4871237A | Method and apparatus for adjusting imaging performance of projection optical apparatus | Emerging Cross-Sectional Technologies | 65 | Expired |
| US4734746A | Exposure method and system for photolithography | Physics | 51 | Expired |
| US4592625A | Double-conjugate maintaining optical system | Physics | 26 | Expired |
| US4883345A | Projection optical apparatus | Physics | 21 | Expired |
| US4624551A | Light irradiation control method for projection exposure apparatus | Physics | 20 | Expired |
| US5682226A | Photomask, an exposure method and a projection exposure apparatus | Physics | 12 | Expired |
| US4498762A | Projection type exposure apparatus | Physics | 11 | Expired |
| US4037943A | Reflection type image forming optical system having a large angle of view | Physics | 7 | Expired |
| US5592259A | Photomask, an exposure method and a projection exposure apparatus | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.