Inventor · Zama, JP

Satoru Anzai

10Patents
8h-index
11Co-inventors
69Inventor score

Filing activity: Mar 10, 1975 → Oct 22, 1996

Most-cited inventions

PatentTitleAreaCited byStatus
US4666273A Automatic magnification correcting system in a projection optical apparatus Physics 84 Expired
US4871237A Method and apparatus for adjusting imaging performance of projection optical apparatus Emerging Cross-Sectional Technologies 65 Expired
US4734746A Exposure method and system for photolithography Physics 51 Expired
US4592625A Double-conjugate maintaining optical system Physics 26 Expired
US4883345A Projection optical apparatus Physics 21 Expired
US4624551A Light irradiation control method for projection exposure apparatus Physics 20 Expired
US5682226A Photomask, an exposure method and a projection exposure apparatus Physics 12 Expired
US4498762A Projection type exposure apparatus Physics 11 Expired
US4037943A Reflection type image forming optical system having a large angle of view Physics 7 Expired
US5592259A Photomask, an exposure method and a projection exposure apparatus Physics 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.