Automatic magnification correcting system in a projection optical apparatus
US4666273A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1986 |
| Grant date | May 19, 1987 |
| Priority date | — |
| Expiry date | Mar 25, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70891
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for projecting the image of an object onto a substrate comprises light source means for supplying light energy for illuminating the object, optical means for forming the image of the object on the substrate, the image magnification of the optical means being heated and varied by the light energy from the light source means, means for monitoring the manner in which the light energy is applied to the optical means, means for determining the variation in the image magnification of the optical means in response to the monitor means, and means for adjusting the size of the image formed on the substrate in response to the determining means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.