Sha Rin
3Patents
1h-index
7Co-inventors
30Inventor score
Filing activity: Nov 8, 2019 → Nov 8, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12094695B2 | Multi-zone temperature control plasma reactor | Emerging Cross-Sectional Technologies | 1 | Active |
| US12309891B2 | Control method for multi-zone active-matrix temperature control in plasma processing apparatus | Electricity | 0 | Active |
| US12046458B2 | Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.