Multi-zone heating apparatus, bottom electrode assembly, plasma processing apparatus, and temperature adjusting method
US12046458B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 8, 2021 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | Oct 1, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2007
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed are a multi-zone heating apparatus, a bottom electrode assembly, a plasma processing apparatus, and a temperature adjusting method, wherein the multi-zone heating apparatus includes: a plurality of foil heaters; a plurality of switches, each switch being connected with a foil heater to form a heating unit; two ends of the plurality of heating units are connected to a ground bus and a power supply bus, respectively; a plurality of driving wires, each driving wire being connected with a switch and configured to transmit a control signal of the duty cycle of the switch, the switches being configured to independently control the operating time of the connected foil heaters based on the control signal. The multi-zone heating apparatus can be integrated between the electrostatic chuck and the base in the plasma processing apparatus and can reduce use of external conductive wires, thereby reducing the demand for filters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.