Shaoyin Chen
4Patents
1h-index
4Co-inventors
37Inventor score
Filing activity: Apr 20, 2001 → Jun 7, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6844250B1 | Method and system for laser thermal processing of semiconductor devices | Electricity | 14 | Expired |
| US9401277B2 | Substrate processing with reduced warpage and/or controlled strain | Performing Operations; Transporting | 1 | Active |
| US6777329B2 | Method to form C54 TiSi2 for IC device fabrication | Electricity | 0 | Expired |
| US7612372B1 | Method and system for laser thermal processing of semiconductor devices | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.