Shiru Wang
1Patents
0h-index
1Co-inventors
16Inventor score
Filing activity: Oct 21, 2021 → Oct 21, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12198913B2 | Semiconductor process apparatus and process chamber | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.