Shozo Hosoda
5Patents
5h-index
22Co-inventors
59Inventor score
Filing activity: Oct 30, 1986 → Apr 28, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6110287A | Plasma processing method and plasma processing apparatus | Electricity | 238 | Expired |
| US5611655A | Vacuum process apparatus and vacuum processing method | Emerging Cross-Sectional Technologies | 77 | Expired |
| US5779803A | Plasma processing apparatus | Electricity | 43 | Expired |
| US4782037A | Process of fabricating a semiconductor insulated circuit device having a phosphosilicate glass insulating film | Electricity | 40 | Expired |
| US5578164A | Plasma processing apparatus and method | Electricity | 19 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.