Simon De Groot
6Patents
4h-index
17Co-inventors
50Inventor score
Filing activity: Jun 12, 2001 → Jul 27, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6563564B2 | Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby | Physics | 29 | Expired |
| US7262831B2 | Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus | Physics | 24 | Expired |
| US7403264B2 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Physics | 19 | Active |
| US7626684B2 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Physics | 8 | Active |
| US7889316B2 | Method for patterning a radiation beam, patterning device for patterning a radiation beam | Physics | 0 | Active |
| US11880314B1 | Microcontroller for driving an external device | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.