Somil KAPADIA
2Patents
1h-index
9Co-inventors
30Inventor score
Filing activity: Apr 20, 2016 → Jan 10, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10679827B2 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Electricity | 2 | Active |
| US10185313B2 | Eco-efficiency characterization tool | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.