Sonoko Tohda
5Patents
2h-index
8Co-inventors
36Inventor score
Filing activity: Jan 11, 1996 → May 7, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5904556A | Method for making semiconductor integrated circuit device having interconnection structure using tungsten film | Electricity | 40 | Expired |
| US6780757B2 | Semiconductor integrated circuit device and method for making the same | Electricity | 12 | Expired |
| US6583049B2 | Semiconductor integrated circuit device and method for making the same | Electricity | 2 | Expired |
| US6300237A | Semiconductor integrated circuit device and method for making the same | Electricity | 2 | Expired |
| US6538329B2 | Semiconductor integrated circuit device and method for making the same | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.