Inventor · Scotts Valley, CA, US

Soon Yuh

2Patents
1h-index
4Co-inventors
30Inventor score

Filing activity: May 19, 2000 → Aug 23, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6761770B2 Atmospheric pressure wafer processing reactor having an internal pressure control system and method Physics 7 Expired
US6576060B1 Protective gas shield apparatus Chemistry; Metallurgy 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.