Inventor · Baoshan, TW

Span Lu

2Patents
1h-index
7Co-inventors
30Inventor score

Filing activity: Nov 7, 2002 → Mar 3, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6647307B1 Method for controlling queue time constraints in a fabrication facility Physics 10 Expired
US7035705B2 System and method for process contamination prevention for semiconductor manufacturing Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.