Stephan Melzig
1Patents
1h-index
4Co-inventors
25Inventor score
Filing activity: Jan 31, 2017 → Jan 31, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10185312B2 | Insitu tool health and recipe quality monitoring on a CDSEM | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.