Insitu tool health and recipe quality monitoring on a CDSEM

US10185312B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Daniel Fischer · Furth, DE
• Yvonne Jänicke · Dresden, DE
• Stephan Melzig · Dresden, DE
• Alexander Ullrich · Dresden, DE
• Martin Pilz · Backnang, DE

Key dates

• Filing date: Jan 31, 2017
• Grant date: Jan 22, 2019
• Expiry date: Apr 9, 2037

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/80
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Systems, methods, and computer program products for monitoring the tool health of on a critical dimension scanning electron microscope (CDSEM) and recipe quality on a CDSEM. Run-time data from a critical dimension scanning electron microscope is received at a computer. The computer converts the run-time data to time-sequenced data, and analyzes the time-sequenced data to detect an operational abnormality associated with the CDSEM.