Stephen Morgan
3Patents
1h-index
14Co-inventors
41Inventor score
Filing activity: Jul 13, 2011 → Jan 10, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8908147B2 | Method and apparatus for determining an overlay error | Physics | 8 | Active |
| US11580274B2 | Method and apparatus for inspection and metrology | Physics | 1 | Active |
| US12204826B2 | Method and apparatus for inspection and metrology | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.