Steve Chen
2Patents
2h-index
3Co-inventors
30Inventor score
Filing activity: Feb 25, 1997 → Sep 2, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5849092A | Process for chlorine trifluoride chamber cleaning | Emerging Cross-Sectional Technologies | 66 | Expired |
| US5926743A | Process for chlorine trifluoride chamber cleaning | Emerging Cross-Sectional Technologies | 33 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.