Steve Slonaker
2Patents
2h-index
2Co-inventors
24Inventor score
Filing activity: May 22, 2001 → May 20, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6664121B2 | Method and apparatus for position measurement of a pattern formed by a lithographic exposure tool | Physics | 23 | Expired |
| US6538753B2 | Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools | Physics | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.