Sukesh Mohan
1Patents
1h-index
2Co-inventors
22Inventor score
Filing activity: Nov 12, 2002 → Nov 12, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7265382B2 | Method and apparatus employing integrated metrology for improved dielectric etch efficiency | Electricity | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.