Sumio Yabe
1Patents
1h-index
7Co-inventors
25Inventor score
Filing activity: Jul 28, 2004 → Jul 28, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7578886B2 | Substrate processing apparatus, substrate processing method, and substrate holding apparatus | Performing Operations; Transporting | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.